Associate Professor of Chemical and Environmental Engineering

The University of Arizona, Tucson, AZ  85721

Phone:  (520) 621-6101, Fax: (520) 621-6048

E-mail:  ara@email.arizona.edu

Educational Background:

1992    Ph.D.     Chemical Engineering, Tufts University, Medford, MA

1985    MSCE    Tufts University, Medford, MA

1983    BSCE    Tufts University, Medford, MA

Professional Experience: 

2000-Present    Koshiyama Associate Professor of Planarization 

Department of Chemical and Environmental Engineering

The University of Arizona, Tucson, Arizona, USA

1997-Present   Lufkin Visiting Professor 

Department of Mechanical Engineering

Tufts University, Medford, MA, USA

1992-2000        Materials Technology Manager

Intel Corporation, Santa, Clara, CA, USA

1987-1992        Process Development Manager

Digital Equipment Corporation, Hudson, MA, USA

1985-1987        Process Development Engineer

Analog Devices Inc., Wilmington, MA, USA

1983-1985        Process Development Engineer

BTU International Inc., North Billerica, MA, USA

Honors and Awards:  

• The Isamu and Masako Koshiyama Endowed Professorship in the NSF/SRC Engineering Research Center for Environmentally Benigh Semiconductor Manufacturing (2003)
• Intel Divisional Recognition Award for Tungsten CMP Slurry Development (1999), Oxide CMP Slurry Development (1998) and Cleaning Solutions Development (1996)
• Intel Instructor Recognition Award for Employee Training in areas of Supplier Management, Risk Assessment, Change Control, SPC and Measurement Capability Analysis (1999)
• Marquis Who's Who in Science and Engineering, 4th Edition (1998)

Publications: 

Please see publications page.